Irradiation effects of silicon dioxide films implanted by carbon ions
| dc.contributor.author | Yu, Y. H. | |
| dc.contributor.author | Zhao, J. | |
| dc.contributor.author | Jin, S. | |
| dc.date.accessioned | 2021-10-14T14:23:47Z | |
| dc.date.available | 2021-10-14T14:23:47Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4967 | |
| dc.source | IIOimport | |
| dc.title | Irradiation effects of silicon dioxide films implanted by carbon ions | |
| dc.type | Oral presentation | |
| dc.source.peerreview | no | |
| dc.source.conference | MRS Fall Meeting Symposium O: Ion Beam Synthesis and Processing of Advanced Materials; November 27-29, 2000; Boston, MA, USA. | |
| dc.source.conferencelocation | ||
| imec.availability | Published - imec |
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