Process inspection by laser beam scanning of unpatterned wafers

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Authors
Mertens, Paul; Devriendt, Katia; Zeng, Andrew; Fyen, Wim; Bearda, Twan; Vos, Rita; Kenis, Karine; Arnauts, Sophia; Schmolke, R.; Wagner, P.; Heyns, Marc
Conference
SEMICON Europa 2000: European IEEE/SEMI Semiconductor Manufacturing Conference
Title
Process inspection by laser beam scanning of unpatterned wafers
Publication type
Proceedings paper
Embargo date
9999-12-31
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