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Leakage current mechanisms in shallow p-n junction diodes using advanced isolation schemes

dc.contributor.authorPoyai, Amporn
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorRooyackers, Rita
dc.contributor.authorBadenes, Gonçal
dc.date.accessioned2021-10-14T14:28:39Z
dc.date.available2021-10-14T14:28:39Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4994
dc.sourceIIOimport
dc.titleLeakage current mechanisms in shallow p-n junction diodes using advanced isolation schemes
dc.typeMeeting abstract
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageCM34
dc.source.conferenceBelgische Natuurkundige Vereniging / Société Belge de Physique: General Scientific Meeting
dc.source.conferencedate25/05/2000
dc.source.conferencelocationLouvain-la-Neuve Belgium
imec.availabilityPublished - open access


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