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Probing nitride thin films in 3-dimensions using a variable energy electron beam

dc.contributor.authorTrager-Cowan, Carol
dc.contributor.authorMcColl, D.
dc.contributor.authorSweeney, F.
dc.contributor.authorGrimson, S.T.F.
dc.contributor.authorTreguer, J.-F.
dc.contributor.authorMohammed, A.
dc.contributor.authorMiddleton, P.G.
dc.contributor.authorManson-Smith, S.K.
dc.contributor.authorO'Donnell, K.P.
dc.contributor.authorVan der Stricht, Wim
dc.contributor.authorMoerman, Ingrid
dc.contributor.authorDemeester, Piet
dc.contributor.authorWu, M.F.
dc.contributor.authorVantomme, Andre
dc.contributor.authorZubia, D.
dc.contributor.authorHersee, S.D.
dc.date.accessioned2021-10-14T14:29:27Z
dc.date.available2021-10-14T14:29:27Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4998
dc.sourceIIOimport
dc.titleProbing nitride thin films in 3-dimensions using a variable energy electron beam
dc.typeProceedings paper
dc.contributor.imecauthorMoerman, Ingrid
dc.contributor.imecauthorDemeester, Piet
dc.contributor.imecauthorVantomme, Andre
dc.contributor.orcidimecMoerman, Ingrid::0000-0003-2377-3674
dc.contributor.orcidimecDemeester, Piet::0000-0003-2810-3899
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageW5.10
dc.source.conferenceGaN and Related Alloys
dc.source.conferencedate28/11/1999
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 595


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