Browsing Articles by imec author "642dca33491aa638a4dbdc8cee2e12ba7e8b2bff"
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Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions
Le, Quoc Toan; Arslan, Esen; Rip, Jens; De Coster, Hanne; Verdonck, Patrick; Radisic, Dunja; Schleicher, Filip; Vaesen, Inge; Conard, Thierry; Altamirano Sanchez, Efrain (2023) -
Using water structuring by ions to address pattern loading in wet HF-based oxide recess etch
Vereecke, Guy; De Coster, Hanne; Dochain, Denis; Nurekeyeva, Kunsulu; Conlan, Shona; Nsimba, Anthony; Wostyn, Kurt; Altamirano Sanchez, Efrain (2023) -
Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
Vereecke, Guy; De Coster, Hanne; Van Alphen, Senne; Carolan, Patrick; Bender, Hugo; Willems, Kherim; Ragnarsson, Lars-Ake; Van Dorpe, Pol; Horiguchi, Naoto; Holsteyns, Frank (2018)