Browsing Articles by imec author "a6a0997bdc2bdfc7af9000956d75b9801c14abca"
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AlN/AlGaN/GaN wafer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs
Kandaswamy, Prem Kumar; Liang, Hu; Zhao, Ming; Saripalli, Yoga; Porter Carlson, Eric; Thapa, Sarad Bahadur; Van Hove, Marleen; Richard, Olivier; De Vos, Brecht; Vancoille, Eric; Dutta, Barundeb (2014) -
Investigation of Cl2 etch in view of extremely low temperature selective epitaxial processes
Hikavyy, Andriy; Kruv, Anastaiia; Van Opstal, Tinneke; De Vos, Brecht; Porret, Clément; Loo, Roger (2017) -
Low temperature epitaxy and the importance of moisture control
Leys, Frederik; Hikavyy, Andriy; Machkaoutsan, Vladimir; De Vos, Brecht; Geenen, Luc; Van Daele, Benny; Loo, Roger; Caymax, Matty (2008) -
Low temperature pre-epi treatment: critical parameters to control interface contamination
Loo, Roger; Hikavyy, Andriy; Leys, Frederik; Wada, Masayuki; De Vos, Brecht; Pacco, Antoine; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Vanherle, Wendy; Caymax, Matty (2009)