Browsing Articles by imec author "ba00fdae216da6c469dbaf80ee2ee11ae6408062"
Now showing items 1-8 of 8
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A methodology for mechanical stress and wafer warpage minimization during 3D NAND fabrication
Kruv, Anastasiia; Gonzalez, Mario; Okudur, Oguzhan Orkut; Spampinato, Valentina; Franquet, Alexis; Vadakupudhu Palayam, Senthil; Arreghini, Antonio; Van den Bosch, Geert; Rosmeulen, Maarten; De Wolf, Ingrid (2022) -
Extraction of elastic modulus of porous ultra-thin low-k films by two-dimensional finite-element simulations of nanoindentation
Okudur, Oguzhan Orkut; Vanstreels, Kris; De Wolf, Ingrid; Hangen, Ude (2016) -
Gate-Induced-Drain-Leakage (GIDL) in CMOS Enhanced by Mechanical Stress
Lee, Kookjin; Kaczer, Ben; Kruv, Anastasiia; Gonzalez, Mario; Eneman, Geert; Okudur, Oguzhan Orkut; Grill, Alexander; De Wolf, Ingrid (2022) -
Impact of Externally Induced Local Mechanical Stress on Electrical Performance of Decananometer MOSFETs
Lee, Kookjin; Kaczer, Ben; Kruv, Anastasiia; Gonzalez, Mario; Eneman, Geert; Okudur, Oguzhan Orkut; Grill, Alexander; De Wolf, Ingrid (2022) -
Scaling-friendly approaches to minimize the magnitude and asymmetry of wafer warpage during 3-D NAND fabrication
Okudur, Oguzhan Orkut; Gonzalez, Mario; Van den Bosch, Geert; Rosmeulen, Maarten (2023) -
Substrate independent elastic modulus of thin low dielectric constant materials
Okudur, Oguzhan Orkut; Vanstreels, Kris; De Wolf, Ingrid; Hangen, Ude; Qiu, Anqi (2017) -
Tuning the properties of periodic mesoporous organosilica films for low-k application by Gemini surfactants
Redzheb, Murad; Okudur, Oguzhan Orkut; Bernstorff, Sigrid; Juraic, Krunoslav; Van der Voort, Pascal; Armini, Silvia (2018) -
Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics
Krishtab, Mikhail; Stassen, Ivo; Stassin, Timothee; Cruz, Alexander John; Okudur, Oguzhan Orkut; Armini, Silvia; Wilson, Chris; De Gendt, Stefan; Ameloot, Rob (2019)