Browsing Articles by imec author "c99a0125f3368c9025cdc3f1d1b2c2efe142ba04"
Now showing items 1-6 of 6
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A deep level transient spectroscopy study of hole traps in GexSe1-x-based layers for ovonic threshold switching selectors
Hsu, Brent; Simoen, Eddy; Lin, Dennis; Stesmans, Andre; Goux, Ludovic; Delhougne, Romain; Carolan, Patrick; Bender, Hugo; Kar, Gouri Sankar (2020) -
Area-Selective Deposition of AlOx and Al-Silicate for Fully Self- Aligned Via Integration
Pasquali, Mattia; Brady-Boyd, Anita; Lesniewska, Alicja; Carolan, Patrick; Conard, Thierry; O'Connor, Robert; De Gendt, Stefan; Armini, Silvia (2023) -
Electrical activity of extended defects in relaxed InxGa1-xAs hetero-epitaxial layers
Claeys, Cor; Hsu, Brent; Mols, Yves; Kunert, Bernardette; Bender, Hugo; Seidel, Felix; Carolan, Patrick; Langer, Robert; Merckling, Clement; Alian, AliReza; Waldron, Niamh; Eneman, Geert; Collaert, Nadine; Heyns, Marc; Simoen, Eddy (2020) -
MoS2 synthesis by Gas Source MBE for transition metal dichalcogenides integration on large scale substrates
El Kazzi, Salim; Mortelmans, Wouter; Nuytten, Thomas; Meersschaut, Johan; Carolan, Patrick; Landeloos, Lien; Conard, Thierry; Radu, Iuliana; Heyns, Marc; Merckling, Clement (2018) -
Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO2 Patterns
Viva, Alessandro; Pasquali, Mattia; Carolan, Patrick; Sergeant, Stefanie; Meersschaut, Johan; Conard, Thierry; De Gendt, Stefan; Armini, Silvia (2022-03-29) -
Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors
Vereecke, Guy; De Coster, Hanne; Van Alphen, Senne; Carolan, Patrick; Bender, Hugo; Willems, Kherim; Ragnarsson, Lars-Ake; Van Dorpe, Pol; Horiguchi, Naoto; Holsteyns, Frank (2018)