Authors

van Es, C. M.; Eijkemans, T. J.; Wolter, J. H.; Pereira, Ricardo; Van Hove, Marleen; Van Rossum, Marc

Conference

Compound Semiconductors 1994. Proceedings of the 21st International Symposium

Title

Influence of CH4/H2 reactive ion etching on the electrical and optical properties of AlGaAs/GaAs/InGaAs/GaAs heterostructures

Publication type

Proceedings paper

Embargo date

9999-12-31