Publication:
Arsenic and phosphorus co-implantation for deep-submicron CMOS gate and source/drain engineering
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1903 since deposited on 2021-10-14
2last month
Acq. date: 2026-01-09
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Metrics
Views
1903 since deposited on 2021-10-14
2last month
Acq. date: 2026-01-09
Citations