Optimisation of active area edge protection in shallow trench isolation

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Authors
Augendre, Emmanuel; Rooyackers, Rita; Pochet, Sandrine; Grau, Lluis; Sleeckx, Erik; Vandamme, Ewout; Badenes, Gonçal
Conference
ULSI Process Integration II; 26 March 2001; Washington, D.C., USA.
Title
Optimisation of active area edge protection in shallow trench isolation
Publication type
Proceedings paper
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