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Optimisation of active area edge protection in shallow trench isolation

dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorRooyackers, Rita
dc.contributor.authorPochet, Sandrine
dc.contributor.authorGrau, Lluis
dc.contributor.authorSleeckx, Erik
dc.contributor.authorVandamme, Ewout
dc.contributor.authorBadenes, Gonçal
dc.date.accessioned2021-10-14T16:36:19Z
dc.date.available2021-10-14T16:36:19Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5021
dc.sourceIIOimport
dc.titleOptimisation of active area edge protection in shallow trench isolation
dc.typeProceedings paper
dc.contributor.imecauthorSleeckx, Erik
dc.contributor.orcidimecSleeckx, Erik::0000-0003-2560-6132
dc.source.peerreviewno
dc.source.beginpage539
dc.source.endpage546
dc.source.conferenceULSI Process Integration II; 26 March 2001; Washington, D.C., USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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