Comparative study of porous SOG films with different non-destructive instrumentation

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Authors
Baklanov, Mikhaïl; Kondoh, Eiichi; Linskens, Frank; Gidley, D. W.; Lee, Hean-Cheal; Mogilnikov, K. P.; Sune, Jorge
Conference
Proceedings of the IEEE 2001 International Interconnect Technology Conference
Title
Comparative study of porous SOG films with different non-destructive instrumentation
Publication type
Proceedings paper
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