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Comparative study of porous SOG films with different non-destructive instrumentation

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorKondoh, Eiichi
dc.contributor.authorLinskens, Frank
dc.contributor.authorGidley, D. W.
dc.contributor.authorLee, Hean-Cheal
dc.contributor.authorMogilnikov, K. P.
dc.contributor.authorSune, Jorge
dc.date.accessioned2021-10-14T16:36:36Z
dc.date.available2021-10-14T16:36:36Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5034
dc.sourceIIOimport
dc.titleComparative study of porous SOG films with different non-destructive instrumentation
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage189
dc.source.endpage191
dc.source.conferenceProceedings of the IEEE 2001 International Interconnect Technology Conference
dc.source.conferencedate4/06/2001
dc.source.conferencelocationBurlingame, CA USA
imec.availabilityPublished - imec


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