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Advanced RBS analysis of thin films in micro-electronics
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Authors
Brijs, Bert
;
Deleu, Jeroen
;
Huyghebaert, Cedric
;
Nauwelaerts, Sophie
;
Nakajima, K.
;
Kimura, K.
;
Vandervorst, Wilfried
Conference
Application of Accelerators in Research and Industry: Sixteenth International Conference; Denton, TX, USA, 1-5 Nov 2000.
Title
Advanced RBS analysis of thin films in micro-electronics
Publication type
Proceedings paper
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