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Advanced RBS analysis of thin films in micro-electronics

dc.contributor.authorBrijs, Bert
dc.contributor.authorDeleu, Jeroen
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorNauwelaerts, Sophie
dc.contributor.authorNakajima, K.
dc.contributor.authorKimura, K.
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T16:39:00Z
dc.date.available2021-10-14T16:39:00Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5097
dc.sourceIIOimport
dc.titleAdvanced RBS analysis of thin films in micro-electronics
dc.typeProceedings paper
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewno
dc.source.beginpage470
dc.source.endpage475
dc.source.conferenceApplication of Accelerators in Research and Industry: Sixteenth International Conference; Denton, TX, USA, 1-5 Nov 2000.
dc.source.conferencelocation
imec.availabilityPublished - imec


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