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Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD

dc.contributor.authorBrijs, Bert
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorNauwelaerts, Sophie
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorNakajima, K.
dc.contributor.authorKimura, K.
dc.contributor.authorBergmaier, A.
dc.contributor.authorDollinger, G.
dc.contributor.authorLennard, W. N.
dc.contributor.authorTerwagne, G.
dc.contributor.authorVantomme, Andre
dc.date.accessioned2021-10-14T16:39:04Z
dc.date.available2021-10-14T16:39:04Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5098
dc.sourceIIOimport
dc.titleQuantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD
dc.typeOral presentation
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorVantomme, Andre
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.source.peerreviewno
dc.source.conference15th International Conference on Ion Beam Analysis (IBA); July 2001; Cairns, Australia.
dc.source.conferencelocation
imec.availabilityPublished - imec


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