Publication:

Electrical characterization of high-k materials prepared by Atomic Layer CVD (ALCVD)

Date

2001

Proceedings Paper

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Author(s)

Carter, Richard

;

Cartier, Eduard

;

;

De Gendt, Stefan

;

Degraeve, Robin

;

Groeseneken, Guido

;

;

Kauerauf, Thomas

;

Kerber, Andreas

;

Kubicek, Stefan

;

Lujan, Guilherme

;

Pantisano, Luigi

;

;

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Acq. date: 2026-08-31