Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Towards Sub-10 nm carrier profiling with spreading resistance techniques
Publication:
Towards Sub-10 nm carrier profiling with spreading resistance techniques
Copy permalink
Date
2001
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Clarysse, Trudo
;
Eyben, Pierre
;
Hantschel, Thomas
;
Vandervorst, Wilfried
Journal
Materials Science in Semiconductor Processing
Abstract
Description
Metrics
Views
1852
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-16
Citations
Metrics
Views
1852
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-16
Citations