Authors

Cosnier, Vincent; Bender, Hugo; Caymax, Matty; Chen, Jian; Conard, Thierry; Nohira, Hiroshi; Richard, Olivier; Tsai, Wilman; Vandervorst, Wilfried; Young, Edward; Zhao, Chao; De Gendt, Stefan; Heyns, Marc; Maes, Jos; Tuominen, Marko; Rochat, N.; Olivier, M.; Chabli, A.

Conference

Extended Abstracts of the International Workshop on Gate Insulator - IWGI

Title

Infrared interface analysis of high-k dielectrics deposited by atomic layer chemical vapour deposition

Publication type

Proceedings paper