Formation of epitaxial CoSi2 by a Cr or Mo interlayer: comparison with a Ti interlayer

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Authors

Detavernier, C.; Van Meirhaeghe, R. L.; Cardon, F.; Maex, Karen; Bender, Hugo; Brijs, Bert; Vandervorst, Wilfried

Issue

4

Journal

Journal of Applied Physics

Volume

89

Title

Formation of epitaxial CoSi2 by a Cr or Mo interlayer: comparison with a Ti interlayer

Publication type

Journal article

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