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Silicide engineering: influence of alloying elements on CoSi2 nucleation

dc.contributor.authorDetavernier, C.
dc.contributor.authorVan Meirhaeghe, R. L.
dc.contributor.authorMaex, Karen
dc.contributor.authorCardon, F.
dc.date.accessioned2021-10-14T16:51:17Z
dc.date.available2021-10-14T16:51:17Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5251
dc.sourceIIOimport
dc.titleSilicide engineering: influence of alloying elements on CoSi2 nucleation
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageC8.4
dc.source.conferenceGate stack and silicide issues in silicon processing; MRS Spring Meeting 2000 Symposium
dc.source.conferencedate25/04/2000
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 611


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