Publication:
Characterization and integration in Cu damascene structures of AURORA, an inorganic low-k dielectric
Date
Loading...
Journal
Abstract
Description
Metrics
Views
2008 since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
2008 since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations