Publication:

Characterization and integration in Cu damascene structures of AURORA, an inorganic low-k dielectric

Date

2001

Proceedings Paper

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Author(s)

Alves Donaton, Ricardo

;

Coenegrachts, Bart

;

;

Schaekers, Marc

;

;

;

Baklanov, Mikhaïl

;

Struyf, Herbert

;

;

Vanhaelemeersch, Serge

;

;

Stucchi, Michele

;

De Roest, David

;

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