Authors

Alves Donaton, Ricardo; Coenegrachts, Bart; Sleeckx, Erik; Schaekers, Marc; Sophie, Guus; Matsuki, N.; Baklanov, Mikhaïl; Struyf, Herbert; Lepage, Muriel; Vanhaelemeersch, Serge; Beyer, Gerald; Stucchi, Michele; De Roest, David; Maex, Karen

Conference

Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics

Title

Characterization and integration in Cu damascene structures of AURORA, an inorganic low-k dielectric

Publication type

Proceedings paper