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Characterization and integration in Cu damascene structures of AURORA, an inorganic low-k dielectric

dc.contributor.authorAlves Donaton, Ricardo
dc.contributor.authorCoenegrachts, Bart
dc.contributor.authorSleeckx, Erik
dc.contributor.authorSchaekers, Marc
dc.contributor.authorSophie, Guus
dc.contributor.authorMatsuki, N.
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorStruyf, Herbert
dc.contributor.authorLepage, Muriel
dc.contributor.authorVanhaelemeersch, Serge
dc.contributor.authorBeyer, Gerald
dc.contributor.authorStucchi, Michele
dc.contributor.authorDe Roest, David
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T16:52:32Z
dc.date.available2021-10-14T16:52:32Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5262
dc.sourceIIOimport
dc.titleCharacterization and integration in Cu damascene structures of AURORA, an inorganic low-k dielectric
dc.typeProceedings paper
dc.contributor.imecauthorCoenegrachts, Bart
dc.contributor.imecauthorSleeckx, Erik
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecSleeckx, Erik::0000-0003-2560-6132
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.source.peerreviewno
dc.source.beginpageD5.14.1
dc.source.endpageD5.14-6
dc.source.conferenceMaterials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics
dc.source.conferencedate23/04/2000
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMaterials Research Society Symposium Proceedings; Vol. 612


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