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SSRM & SCM observation of enhanced lateral AS- and BF2-diffusion induced by nitride spacers

dc.contributor.authorEyben, Pierre
dc.contributor.authorDuhayon, Natasja
dc.contributor.authorStuer, Cindy
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorRooyackers, Rita
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBadenes, Gonçal
dc.date.accessioned2021-10-14T16:55:13Z
dc.date.available2021-10-14T16:55:13Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5286
dc.sourceIIOimport
dc.titleSSRM & SCM observation of enhanced lateral AS- and BF2-diffusion induced by nitride spacers
dc.typeProceedings paper
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpageB2.2.1
dc.source.endpageB2.2.12
dc.source.conferenceSi Front-End Processing - Physics and Technology of Dopant-Defect Interactions II
dc.source.conferencedate24/04/2000
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMaterials Research Society Symposium Proceedings; Vol. 610


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