Authors

Eyben, Pierre; Duhayon, Natasja; Stuer, Cindy; De Wolf, Ingrid; Rooyackers, Rita; Clarysse, Trudo; Vandervorst, Wilfried; Badenes, Gonçal

Conference

Si Front-End Processing-Physics and Technology of Dopant-Defect Interactions III

Title

SSRM & SCM observation of modified lateral diffusion of As, BF2 and Sb induced by nitride spacers

Publication type

Proceedings paper

Embargo date

9999-12-31