Publication:
SSRM & SCM observation of modified lateral diffusion of As, BF2 and Sb induced by nitride spacers
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1884 since deposited on 2021-10-14
3last week
Acq. date: 2025-12-08
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Metrics
Views
1884 since deposited on 2021-10-14
3last week
Acq. date: 2025-12-08
Citations