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SSRM & SCM observation of modified lateral diffusion of As, BF2 and Sb induced by nitride spacers

dc.contributor.authorEyben, Pierre
dc.contributor.authorDuhayon, Natasja
dc.contributor.authorStuer, Cindy
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorRooyackers, Rita
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBadenes, Gonçal
dc.date.accessioned2021-10-14T16:55:21Z
dc.date.available2021-10-14T16:55:21Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5287
dc.sourceIIOimport
dc.titleSSRM & SCM observation of modified lateral diffusion of As, BF2 and Sb induced by nitride spacers
dc.typeProceedings paper
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageJ2.2.1
dc.source.endpageJ2.2.6
dc.source.conferenceSi Front-End Processing-Physics and Technology of Dopant-Defect Interactions III
dc.source.conferencedate17/04/2001
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesMaterials Research Society Symposium Proceedings; Vol. 669


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