Authors

Fyen, Wim; Lauerhaas, Jeff; Vos, Rita; Meuris, Marc; Mertens, Paul; Heyns, Marc

Conference

Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS

Title

Non-contact post Cu CMP cleaning using megasonic energy

Publication type

Proceedings paper

Embargo date

9999-12-31