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Alternative gate insulator materials for future generation MOSFETs

dc.contributor.authorHeyns, Marc
dc.contributor.authorBender, Hugo
dc.contributor.authorCarter, Richard
dc.contributor.authorCaymax, Matty
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDegraeve, Robin
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHaukka, S.
dc.contributor.authorHenson, Kirklen
dc.contributor.authorHoussa, Michel
dc.contributor.authorKubicek, Stefan
dc.contributor.authorMaes, Jos
dc.contributor.authorNaili, Mohamed
dc.contributor.authorNohira, Hiroshi
dc.contributor.authorTsai, Wilman
dc.contributor.authorTuominen, Marko
dc.contributor.authorVandervorst, R.
dc.contributor.authorWilhelm, Rudi
dc.contributor.authorYoung, Edward
dc.contributor.authorZhao, Chao
dc.date.accessioned2021-10-14T17:01:50Z
dc.date.available2021-10-14T17:01:50Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5341
dc.sourceIIOimport
dc.titleAlternative gate insulator materials for future generation MOSFETs
dc.typeOral presentation
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.source.peerreviewno
dc.source.conferenceInternational Forum on Semiconductor Technology - IFST; 7-8 March 2001; Antwerpen, Belgium.
dc.source.conferencelocation
imec.availabilityPublished - imec


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