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Charge trapping in SiOx/ZrO2 and SiOx/TiO2 gate dielectric stacks
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Authors
Houssa, Michel
;
Naili, Mohamed
;
Heyns, Marc
;
Stesmans, Andre
Issue
4B
Journal
Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers
Volume
40
Title
Charge trapping in SiOx/ZrO2 and SiOx/TiO2 gate dielectric stacks
Publication type
Journal article
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