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Studies on XLK film characterization and integration in copper damascene processes

dc.contributor.authorIacopi, Francesca
dc.contributor.authorAlves Donaton, Ricardo
dc.contributor.authorCoenegrachts, Bart
dc.contributor.authorKomiya, Takayuki
dc.contributor.authorStruyf, Herbert
dc.contributor.authorLepage, Muriel
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorBoullart, Werner
dc.contributor.authorDe Roest, David
dc.contributor.authorVos, Ingrid
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorVereecke, Guy
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorStucchi, Michele
dc.contributor.authorTokei, Zsolt
dc.contributor.authorMeynen, Herman
dc.contributor.authorBremmer, J. N.
dc.contributor.authorVanhaelemeersch, Serge
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T17:04:14Z
dc.date.available2021-10-14T17:04:14Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5359
dc.sourceIIOimport
dc.titleStudies on XLK film characterization and integration in copper damascene processes
dc.typeProceedings paper
dc.contributor.imecauthorCoenegrachts, Bart
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.source.peerreviewno
dc.source.beginpage287
dc.source.endpage293
dc.source.conferenceAdvanced Metallization Conference 2000
dc.source.conferencedate3/10/2000
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - imec
imec.internalnotesConference Proceedings ULSI XVI


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