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High Q inductor add-on module in thick Cu/SiLK/sup TM/ single damascene

dc.contributor.authorJenei, Snezana
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorWinderickx, Gillis
dc.contributor.authorStruyf, Herbert
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVervoort, Iwan
dc.contributor.authorVos, I.
dc.contributor.authorJaenen, Patrick
dc.contributor.authorCarbonell, Laure
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorDonaton, R. A.
dc.contributor.authorVanhaelemeersch, Serge
dc.contributor.authorMaex, Karen
dc.contributor.authorNauwelaers, Bart
dc.date.accessioned2021-10-14T17:06:13Z
dc.date.available2021-10-14T17:06:13Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5374
dc.sourceIIOimport
dc.titleHigh Q inductor add-on module in thick Cu/SiLK/sup TM/ single damascene
dc.typeProceedings paper
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorWinderickx, Gillis
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorJaenen, Patrick
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.source.peerreviewno
dc.source.beginpage107
dc.source.endpage109
dc.source.conferenceProceedings of the IEEE International Interconnect Technology Conference
dc.source.conferencedate4/06/2001
dc.source.conferencelocationBurlingame, CA USA
imec.availabilityPublished - imec


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