Authors

Lauerhaas, Jeff; Mertens, Paul; Nicolosi, T.; Kenis, Karine; Fyen, Wim; Heyns, Marc

Conference

Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS

Title

Megasonic, non-contact cleaning followed by "Rotagoni" drying of CMP wafers

Publication type

Proceedings paper

Embargo date

9999-12-31