Publication:
Sub 100nm particle removal with deionized water and a megasonic frequency of ~835kHz
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2010 since deposited on 2021-10-14
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Acq. date: 2026-08-10
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Statistics
Views
2010 since deposited on 2021-10-14
3last month
1last week
Acq. date: 2026-08-10
Citations