Authors

Lauerhaas, Jeff; Xu, Kaidong; Vereecke, Guy; Vos, Rita; Kenis, Karine; Mertens, Paul; Wu, Y.; Nicolosi, T.; Heyns, Marc

Conference

200th International Meeting Electrochemical Society: 7th International Symposium on Cleaning Technology in Semiconductor Device

Title

Sub 100nm particle removal with deionized water and a megasonic frequency of ~835kHz

Publication type

Meeting abstract