Authors

Loo, Roger; Meunier-Beillard, Philippe; Dentel, D.; Goryll, M.; Vanhaeren, Danielle; Vescan, L.; Bender, Hugo; Caymax, Matty; Vandervorst, Wilfried

Conference

Amorphous and Heterogeneous Silicon-Based Films

Title

Ge island evolution during growth, in-situ anneal, and Si capping in an industrial CVD reactor

Publication type

Proceedings paper