Authors

Nakabayashi, M.; Ohyama, Hidenori; Simoen, Eddy; Claeys, C.; Tanaka, K.; Kobayashi, K.; Miyahara, K.

Conference

GADEST 2001 - Proceedings of the 9th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology;

Title

Impact of high-energy particle irradiation on polycrystalline silicon films

Publication type

Proceedings paper