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Impact of high-energy particle irradiation on polycrystalline silicon films

dc.contributor.authorNakabayashi, M.
dc.contributor.authorOhyama, Hidenori
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, C.
dc.contributor.authorTanaka, K.
dc.contributor.authorKobayashi, K.
dc.contributor.authorMiyahara, K.
dc.date.accessioned2021-10-14T17:24:49Z
dc.date.available2021-10-14T17:24:49Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5506
dc.sourceIIOimport
dc.titleImpact of high-energy particle irradiation on polycrystalline silicon films
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage471
dc.source.endpage476
dc.source.conferenceGADEST 2001 - Proceedings of the 9th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology;
dc.source.conferencelocation
imec.availabilityPublished - imec


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