Impact of channel engineering technology on HC performance of 100 nm MOSFETs

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Authors
Okhonin, S.; Fazan, P.; Kubicek, Stefan; Henson, Kirklen; De Meyer, Kristin; Ponomarev, Youri
Conference
Proceedings of the 31st European Solid-State Device Research Conference
Title
Impact of channel engineering technology on HC performance of 100 nm MOSFETs
Publication type
Proceedings paper
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