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Sheet resistance corrections for spreading resistance ultra-shallow profiling

dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorPawlik, M.
dc.date.accessioned2021-09-29T13:04:37Z
dc.date.available2021-09-29T13:04:37Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/562
dc.sourceIIOimport
dc.titleSheet resistance corrections for spreading resistance ultra-shallow profiling
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage35.1
dc.source.conference3rd Int. Workshop on the Measurement and Characterizaton of Ultra-Shallow Dopant Profiles in Semiconductors
dc.source.conferencedate20/03/1995
dc.source.conferencelocationReseaech Triangle Park, NC USA
imec.availabilityPublished - open access


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