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Simulation of the initial transient of the Si+ and O+ signals from oxygen sputtered silicon by means of independent models on sputtering and secondary ionization

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1810 since deposited on 2021-10-14
2last month
Acq. date: 2025-12-18

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1810 since deposited on 2021-10-14
2last month
Acq. date: 2025-12-18

Citations