Orientation-dependent stress build-up during the formation of epitaxial CoSi2

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Authors

Steegen, An; Detavernier, C.; Lauwers, A.; Maex, Karen; Van Meirhaeghe, R. L.; Cardon, F.

Issue

1_4

Journal

Microelectronic Engineering

Volume

55

Title

Orientation-dependent stress build-up during the formation of epitaxial CoSi2

Publication type

Journal article

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