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Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab

dc.contributor.authorTilmans, Harrie
dc.contributor.authorZiad, Hocine
dc.contributor.authorJansen, Henri
dc.contributor.authorDi Monaco, Orsola
dc.contributor.authorJourdain, Anne
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorDe Backer, E.
dc.contributor.authorDe Caussemaeker, Ann
dc.contributor.authorBaert, Kris
dc.date.accessioned2021-10-14T18:00:02Z
dc.date.available2021-10-14T18:00:02Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5712
dc.sourceIIOimport
dc.titleWafer-level packaged RF-MEMS switches fabricated in a CMOS fab
dc.typeProceedings paper
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorZiad, Hocine
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.source.peerreviewno
dc.source.beginpage921
dc.source.endpage924
dc.source.conferenceProceedings IEDM; Washington, DC, December 3-5, 2001.
dc.source.conferencelocation
imec.availabilityPublished - imec


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