Step coverage and continuity of an I-PVD Ta(N) barrier layer: limitations

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Authors
Tokei, Zsolt; Mc Inerney, David; Baklanov, Mikhaïl; Beyer, Gerald; Maex, Karen
Conference
Proceedings of the IEEE 2001 International Interconnect Technology Conference
Title
Step coverage and continuity of an I-PVD Ta(N) barrier layer: limitations
Publication type
Proceedings paper
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