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Step coverage and continuity of an I-PVD Ta(N) barrier layer: limitations

dc.contributor.authorTokei, Zsolt
dc.contributor.authorMc Inerney, David
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorBeyer, Gerald
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T18:00:26Z
dc.date.available2021-10-14T18:00:26Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5714
dc.sourceIIOimport
dc.titleStep coverage and continuity of an I-PVD Ta(N) barrier layer: limitations
dc.typeProceedings paper
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage213
dc.source.endpage213
dc.source.conferenceProceedings of the IEEE 2001 International Interconnect Technology Conference
dc.source.conferencedate4/06/2001
dc.source.conferencelocationBurlingame, CA USA
imec.availabilityPublished - imec


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