Publication:

Interfacial stability of high-k dielectrics deposited by atomic layer chemical vapor deposition

Date

2001
Presentation
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Tsai, Wilman
;
Nohira, Hiroshi
;
Carter, Richard
;
Caymax, Matty  
;
Conard, Thierry  
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Pétry, Jasmine
;
Richard, Olivier  
;
Vandervorst, Wilfried  
;
Young, Edward
;
Zhao, Chao
;
Maes, Jos
;
Tuominen, Marko

Journal

Abstract

Description

Statistics

Views

2012 since deposited on 2021-10-14
1last month
Acq. date: 2026-04-06

Citations

Statistics

Views

2012 since deposited on 2021-10-14
1last month
Acq. date: 2026-04-06

Citations