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Optical imaging of high-frequency resonances and semi-static deformations in micro-electromechanical systems (MEMS)

dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorPuers, Bob
dc.contributor.authorVikhagen, E.
dc.date.accessioned2021-10-14T18:08:40Z
dc.date.available2021-10-14T18:08:40Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5758
dc.sourceIIOimport
dc.titleOptical imaging of high-frequency resonances and semi-static deformations in micro-electromechanical systems (MEMS)
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorPuers, Bob
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage357
dc.source.endpage364
dc.source.conferenceProceedings of the 27th International Symposium for Testing and Failure Analysis - ISTFA
dc.source.conferencedate11/11/2001
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access


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