Publication:
Optical imaging of high-frequency resonances and semi-static deformations in micro-electromechanical systems (MEMS)
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1854 since deposited on 2021-10-14
1last month
Acq. date: 2026-04-28
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Statistics
Views
1854 since deposited on 2021-10-14
1last month
Acq. date: 2026-04-28
Citations