Authors

van Spengen, Merlijn; De Wolf, Ingrid; Puers, Bob; Vikhagen, E.

Conference

Proceedings of the 27th International Symposium for Testing and Failure Analysis - ISTFA

Title

Optical imaging of high-frequency resonances and semi-static deformations in micro-electromechanical systems (MEMS)

Publication type

Proceedings paper

Embargo date

9999-12-31