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Improved phosphoric acid mixtures for nitride strip
Publication:
Improved phosphoric acid mixtures for nitride strip
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Date
2001
Proceedings Paper
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5854.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vos, Rita
;
Lux, Marcel
;
Conard, Thierry
;
De Witte, Hilde
;
Mertens, Paul
;
Heyns, Marc
;
Hatcher, Z.
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1877
since deposited on 2021-10-14
Acq. date: 2026-01-06
Citations
Metrics
Views
1877
since deposited on 2021-10-14
Acq. date: 2026-01-06
Citations