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Use of surfactants for improved particle performance of dHF-based cleaning recipes

dc.contributor.authorVos, Rita
dc.contributor.authorXu, Kaidong
dc.contributor.authorLux, Marcel
dc.contributor.authorFyen, Wim
dc.contributor.authorSingh, R.
dc.contributor.authorChen, Zhi Yong
dc.contributor.authorMertens, Paul
dc.contributor.authorHatcher, Z.
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T18:21:43Z
dc.date.available2021-10-14T18:21:43Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5824
dc.sourceIIOimport
dc.titleUse of surfactants for improved particle performance of dHF-based cleaning recipes
dc.typeProceedings paper
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorLux, Marcel
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage263
dc.source.endpage266
dc.source.conferenceUltra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS
dc.source.conferencedate18/09/2000
dc.source.conferencelocationOostende Belgium
imec.availabilityPublished - open access
imec.internalnotesSolid State Phenomena. Part B; Vol. 76-77


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