Publication:
Comparison of Bosch and cryogenic processes for patterning high aspect ration features in silicon
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1963 since deposited on 2021-10-14
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Acq. date: 2026-10-05
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Statistics
Views
1963 since deposited on 2021-10-14
2last month
2last week
Acq. date: 2026-10-05
Citations