Publication:
Comparison of Bosch and cryogenic processes for patterning high aspect ration features in silicon
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1950 since deposited on 2021-10-14
10last month
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Acq. date: 2026-01-11
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Views
1950 since deposited on 2021-10-14
10last month
5last week
Acq. date: 2026-01-11
Citations